Bogaerts, WimWimBogaertsDumon, PieterPieterDumonWiaux, VincentVincentWiauxWouters, Johan M. D.Johan M. D.WoutersBeckx, StephanStephanBeckxBaets, RoelRoelBaets2021-10-152021-10-152003-09https://imec-publications.be/handle/20.500.12860/7233Tolerance control for photonic crystal structures fabricated with deep UV lithographyProceedings paper