Rusu, CristinaCristinaRusuJourdain, AnneAnneJourdainWitvrouw, AnnAnnWitvrouwTilmans, HarrieHarrieTilmans2021-10-142021-10-142002-05https://imec-publications.be/handle/20.500.12860/6779Zero-level packaging for MEMSProceedings paper