Investigation of the subthreshold swing in vertical tunnel-FETs using H2 and D2 anneals

Vandooren, AnneAnneVandoorenWalke, AmeyAmeyWalkeVerhulst, AnneAnneVerhulstRooyackers, RitaRitaRooyackersCollaert, NadineNadineCollaertThean, AaronAaronThean2021-10-222021-10-2220140018-9383https://imec-publications.be/handle/20.500.12860/24736Investigation of the subthreshold swing in vertical tunnel-FETs using H2 and D2 annealsJournal articlehttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6697848