Silicon photonic temperature sensor: from photonic integrated chip to fully packaged miniature probe

Missinne, JeroenJeroenMissinneGeudens, ViktorViktorGeudensPoulopoulos, GiannisGiannisPoulopoulosSzaj, MichalMichalSzajSyriopoulos, GeorgeGeorgeSyriopoulosZervos, CharalamposCharalamposZervosKyriazi, EvridikiEvridikiKyriaziAvramopoulos, HerculesHerculesAvramopoulosVan Steenberge, GeertGeertVan Steenberge2024-09-142024-09-142024-JAN 1WOS:001283921400003https://imec-publications.be/handle/20.500.12860/44493Silicon photonic temperature sensor: from photonic integrated chip to fully packaged miniature probeJournal article10.1117/1.JOM.4.1.011005WOS:001283921400003MICROLENSES