Filho Goncalez, WalterWalterFilho GoncalezBorga, MatteoMatteoBorgaGeens, KarenKarenGeensCingu, DeepthiDeepthiCinguChatterjee, UrmimalaUrmimalaChatterjeeYou, ShuzhenShuzhenYouBakeroot, BenoitBenoitBakerootDecoutere, StefaanStefaanDecoutereKnaepen, WernerWernerKnaepenArnou, PanagiotaPanagiotaArnouHomm, PiaPiaHomm2022-11-102021-12-032022-11-102022nahttps://imec-publications.be/handle/20.500.12860/38528AlON gate dielectric and gate trench cleaning for improved relia-bility of vertical GaN MOSFETProceedings paperElectrical & electronic engineering