Aresu, S.S.AresuDe Ceuninck, WardWardDe CeuninckDreesen, R.R.DreesenKroes, K.K.KroesAndries, E.E.AndriesManca, JeanJeanMancaDe Schepper, LucLucDe SchepperDegraeve, RobinRobinDegraeveKaczer, BenBenKaczerD'Olieslaeger, MarcMarcD'OlieslaegerD'Haen, JanJanD'Haen2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/5958High-resolution SILC measurements of thin SiO2 at ultra low voltagesJournal article