Ekkels, PhillipPhillipEkkelsRottenberg, XavierXavierRottenbergPuers, BobBobPuersTilmans, HarrieHarrieTilmans2021-10-172021-10-1720090960-1317https://imec-publications.be/handle/20.500.12860/15263Evaluation of platinum as a structural thin film material for RF-MEMS devicesJournal articlehttp://www.iop.org/EJ/article/0960-1317/19/6/065010/jmm9_6_065010.pdf