Investigation of light-induced deep-level defect activation at the AlN/Si interface

Visalli, DomenicaDomenicaVisalliVan Hove, MarleenMarleenVan HoveLeys, MaartenMaartenLeysDerluyn, JoffJoffDerluynSimoen, EddyEddySimoenSrivastava, PuneetPuneetSrivastavaGeens, KarenKarenGeensDegroote, StefanStefanDegrooteGermain, MarianneMarianneGermainNguyen, Anh Phuc DucAnh Phuc DucNguyenStesmans, AndreAndreStesmansBorghs, GustaafGustaafBorghs2021-10-192021-10-1920111882-0778https://imec-publications.be/handle/20.500.12860/20100Investigation of light-induced deep-level defect activation at the AlN/Si interfaceJournal article