Direct comparison of GaN-based e-mode architectures (recessed MISHEMT and p-GaN HEMTs) processed on 200mm GaN-on-Si with Au-free technology

Marcon, DenisDenisMarconVan Hove, MarleenMarleenVan HoveDe Jaeger, BriceBriceDe JaegerPosthuma, NielsNielsPosthumaWellekens, DirkDirkWellekensYou, ShuzhenShuzhenYouKang, XuanwuXuanwuKangWu, Tian-LiTian-LiWuWillems, MaartenMaartenWillemsStoffels, SteveSteveStoffelsDecoutere, StefaanStefaanDecoutere2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25610Direct comparison of GaN-based e-mode architectures (recessed MISHEMT and p-GaN HEMTs) processed on 200mm GaN-on-Si with Au-free technologyProceedings paperhttp://spie.org/Publications/Proceedings/Paper/10.1117/12.2077806