Composition analysis of III-V materials grown in nanostructures: the self-focusing SIMS approach

Franquet, AlexisAlexisFranquetDouhard, BastienBastienDouhardConard, ThierryThierryConardMelkonyan, DavitDavitMelkonyanVandervorst, WilfriedWilfriedVandervorst2021-10-232021-10-2320161071-1023https://imec-publications.be/handle/20.500.12860/26634Composition analysis of III-V materials grown in nanostructures: the self-focusing SIMS approachJournal articlehttp://scitation.aip.org/content/avs/journal/jvstb/34/3/10.1116/1.4943950