Claeys, CorCorClaeysCollaert, NadineNadineCollaertMertens, HansHansMertensMitard, JeromeJeromeMitardRooyackers, RitaRitaRooyackersSimoen, EddyEddySimoenVandooren, AnneAnneVandoorenVeloso, AnabelaAnabelaVelosoWaldron, NiamhNiamhWaldronWitters, LiesbethLiesbethWittersThean, AaronAaronThean2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26459Technology development challenges for advanced group IV semiconductor devicesMeeting abstract