Thin-film for the realization of high quality on-chip and in-package passives

Carchon, GeertGeertCarchonDe Raedt, WalterWalterDe RaedtBeyne, EricEricBeyne2021-10-162021-10-162005-01https://imec-publications.be/handle/20.500.12860/10179Thin-film for the realization of high quality on-chip and in-package passivesProceedings paper