Dual damascene patterning for full spin-on stack of porous low-K material

Furukawa, YukikoYukikoFurukawaKokubo, TerukazuTerukazuKokuboStruyf, HerbertHerbertStruyfMaenhoudt, MireilleMireilleMaenhoudtVanhaelemeersch, SergeSergeVanhaelemeerschGravesteijn, DirkDirkGravesteijn2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6339Dual damascene patterning for full spin-on stack of porous low-K materialProceedings paper