XPS study of the role of Ti and TiN caps on the Cobalt/SiO2 interface

Conard, ThierryThierryConardKondoh, EiichiEiichiKondohVandervorst, WilfriedWilfriedVandervorstMaex, KarenKarenMaex2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2460XPS study of the role of Ti and TiN caps on the Cobalt/SiO2 interfaceOral presentation