Sleeckx, ErikErikSleeckxSchaekers, MarcMarcSchaekersShi, XiaopingXiaopingShiKunnen, EddyEddyKunnenDegroote, BartBartDegrooteJurczak, GosiaGosiaJurczakde Potter de ten Broeck, MurielMurielde Potter de ten BroeckAugendre, EmmanuelEmmanuelAugendre2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11220Optimization of low-temperature silicon nitride processes for improvement of device performanceJournal article