Effects of voltage cycling on polarization and reliability of 3D SBT ferroelectric capacitors integrated in 0.18um CMOS technology

Wouters, DirkDirkWoutersGoux, LudovicLudovicGouxLisoni, JuditJuditLisoniMaes, DavidDavidMaesVander Meeren, HansHansVander MeerenParaschiv, VasileVasileParaschivHaspeslagh, LucLucHaspeslaghArtoni, CesariCesariArtoniCorallo, GiuseppinaGiuseppinaCoralloZambrano, RaffaeleRaffaeleZambrano2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11573Effects of voltage cycling on polarization and reliability of 3D SBT ferroelectric capacitors integrated in 0.18um CMOS technologyProceedings paper