Fusi, MatteoMatteoFusiLamagna, LucaLucaLamagnaSpiga, SabinaSabinaSpigaFanciulli, MarcoMarcoFanciulliBrammertz, GuyGuyBrammertzMerckling, ClementClementMercklingMeuris, MarcMarcMeurisMolle, AlessandroAlessandroMolle2021-10-192021-10-1920110167-9317https://imec-publications.be/handle/20.500.12860/18937Al2O3 stacks on In0.53Ga0.47As substrates: In situ investigation of the interfaceJournal articlehttp://www.sciencedirect.com/science/article/pii/S0167931710004284