Van Elshocht, SvenSvenVan ElshochtAdelmann, ChristophChristophAdelmannNyns, LauraLauraNynsDelabie, AnneliesAnneliesDelabiePopovici, Mihaela IoanaMihaela IoanaPopoviciSwerts, JohanJohanSwertsMeersschaut, JohanJohanMeersschautShi, XiaopingXiaopingShiGielis, SvenSvenGielisKesters, JurgenJurgenKestersBreuil, LaurentLaurentBreuilRagnarsson, Lars-AkeLars-AkeRagnarssonSchram, TomTomSchramPourtois, GeoffreyGeoffreyPourtoisPierreux, DieterDieterPierreuxMaes, JanJanMaesJurczak, GosiaGosiaJurczakKittl, JorgeJorgeKittl2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16382Implementation of rare earth elements in high-k based gate stacksProceedings paper