Inorganic material profiling using Arn+ cluster: Can we achieve high-quality profiles?

Conard, ThierryThierryConardFleischmann, ClaudiaClaudiaFleischmannHavelund, RasmusRasmusHavelundFranquet, AlexisAlexisFranquetPoleunis, ClaudeClaudePoleunisDelcorte, ArnaudArnaudDelcorteVandervorst, WilfriedWilfriedVandervorst2021-10-252021-10-252018-050169-4332https://imec-publications.be/handle/20.500.12860/30453Inorganic material profiling using Arn+ cluster: Can we achieve high-quality profiles?Journal articlehttps://www.sciencedirect.com/science/article/pii/S0169433218305142