Lei, W.W.LeiPethe, S.S.PetheHwang, S.S.HwangChen, F.F.ChenWu, Z.Z.WuMachillot, J.J.MachillotCockburn, A.A.CockburnJansen, A.A.Jansenvan der Veen, MarleenMarleenvan der VeenVarela Pedreira, OlallaOlallaVarela PedreiraHeylen, NancyNancyHeylenJourdan, NicolasNicolasJourdanLariviere, StephaneStephaneLarivierePark, SeonghoSeonghoParkStruyf, HerbertHerbertStruyfTokei, ZsoltZsoltTokei2022-05-052022-05-052022-05-0520212380-632XWOS:000784773200026https://imec-publications.be/handle/20.500.12860/39744Exploring W-Cu hybrid dual damascene metallization for future nodesProceedings paper10.1109/IITC51362.2021.9537410978-1-7281-7632-1WOS:000784773200026