Croes, KristofKristofCroesDemuynck, StevenStevenDemuynckSiew, Yong KongYong KongSiewWilson, ChrisChrisWilsonHeylen, NancyNancyHeylenBeyer, GeraldGeraldBeyerTokei, ZsoltZsoltTokei2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18751Reliability performance of advanced metallization options for 30nm ½ pitch in SiCOH low-k materialsProceedings paper