Understanding the interaction mechanisms between amorphous carbon sacrificial patterning material and H2 plasma to enable area-selective ALD processes

Zyulkov, IvanIvanZyulkovVoronina, EkaterinaEkaterinaVoroninaChan, BTBTChanRakhimova, TatyanaTatyanaRakhimovaDe Gendt, StefanStefanDe GendtArmini, SilviaSilviaArmini2021-10-282021-10-282019https://imec-publications.be/handle/20.500.12860/34561Understanding the interaction mechanisms between amorphous carbon sacrificial patterning material and H2 plasma to enable area-selective ALD processesMeeting abstract