Le, Quoc ToanQuoc ToanLeVerdonck, PatrickPatrickVerdonckPacco, AntoineAntoinePaccoAltamirano Sanchez, EfrainEfrainAltamirano Sanchez2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/36887Challenges in uniform etching of RutheniumMeeting abstract