Vapor-phase deposition of N3-containing monolayers on SiO2 and Si3N4 for wafer scale biofunctionalization

Vos, RitaRitaVosSteylaerts, TimTimSteylaertsFranquet, AlexisAlexisFranquetMoussa, AlainAlainMoussaStakenborg, TimTimStakenborgJans, KarolienKarolienJans2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/32226Vapor-phase deposition of N3-containing monolayers on SiO2 and Si3N4 for wafer scale biofunctionalizationProceedings paperhttps://www.scientific.net/SSP.282.31