Xu, DongboDongboXuZeng, QinglinQinglinZengGillijns, WernerWernerGillijnsZeng, XuefengXuefengZengSun, YuyangYuyangSunFenger, GermainGermainFenger2025-07-312025-07-312025978-1-5106-8634-20277-786XWOS:001517286200018https://imec-publications.be/handle/20.500.12860/45990Enablement of 0.55NA EUV Bright Field Mask StitchingProceedings paper10.1117/12.3051285978-1-5106-8635-9WOS:001517286200018