Wu, ChenChenWuLi, YunlongYunlongLiBaklanov, MikhaïlMikhaïlBaklanovCroes, KristofKristofCroes2021-10-232021-10-2320152162-8769https://imec-publications.be/handle/20.500.12860/26187Electrical reliability challenges of advanced low-k dielectricsJournal articlehttp://jss.ecsdl.org/content/4/1/N3065.abstract