A novel test structure to study intrinsic reliability of barrier/low-k

Zhao, LarryLarryZhaoTokei, ZsoltZsoltTokeiGianni, Giai GischiaGiai GischiaGianniPantouvaki, MariannaMariannaPantouvakiCroes, KristofKristofCroesBeyer, GeraldGeraldBeyer2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16608A novel test structure to study intrinsic reliability of barrier/low-kProceedings paper