Akanishi, YuyaYuyaAkanishiKesters, ElsElsKestersLe, Quoc ToanQuoc ToanLeHolsteyns, FrankFrankHolsteyns2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30091Corrosion of Co in BEOL interconnects in dilute HF solutionProceedings paperhttps://www.scientific.net/SSP.282.256