Effects of irradiation induced lattice defects on standard trench and fine pattern trench IGBT characteristics

Nakabayashi, M.M.NakabayashiOhyama, H.H.OhyamaKaneko, T.T.KanekoHanano, K.K.HananoRafi, J.M.J.M.RafiSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-182021-10-1820090921-4526https://imec-publications.be/handle/20.500.12860/15910Effects of irradiation induced lattice defects on standard trench and fine pattern trench IGBT characteristicsJournal article