Simulation of the effect of a resist-surface bound air bubble on imaging in immersion lithography

De Bisschop, PeterPeterDe BisschopErdmann, AndreasAndreasErdmannRathsfeld, AndreasAndreasRathsfeld2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10289Simulation of the effect of a resist-surface bound air bubble on imaging in immersion lithographyProceedings paper