A BISTABLE SILICON PHOTONIC MEMS PHASE SWITCH FOR NONVOLATILE PHOTONIC CIRCUITS

Edinger, PierrePierreEdingerTakabayashi, Alain YujiAlain YujiTakabayashiErrando-Herranz, CarlosCarlosErrando-HerranzKhan, UmarUmarKhanAntony, CleitusCleitusAntonyTalli, GiuseppeGiuseppeTalliVerheyen, PeterPeterVerheyenBogaerts, WimWimBogaertsQuack, NielsNielsQuackGylfason, Kristinn B.Kristinn B.Gylfason2023-08-112023-06-202023-08-1120221084-6999WOS:000784358100253https://imec-publications.be/handle/20.500.12860/41853A BISTABLE SILICON PHOTONIC MEMS PHASE SWITCH FOR NONVOLATILE PHOTONIC CIRCUITSProceedings paper10.1109/MEMS51670.2022.9699739978-1-6654-0911-7WOS:000784358100253