Etch residue formation and growth on patterned porous dielectrics: angle-resolved XPS and Infrared characterization

Le, Quoc ToanQuoc ToanLeKesters, ElsElsKestersHolsteyns, FrankFrankHolsteyns2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28771Etch residue formation and growth on patterned porous dielectrics: angle-resolved XPS and Infrared characterizationMeeting abstract