Three-dimensional TiO2 thin-film electrodes deposited on micro-pillars by spatial atomic layer deposition for Li+-ion batteries

Moitzheim, SebastienSebastienMoitzheimBalder, EllisEllisBalderPoodt, PaulPaulPoodtUnnikrishnan, SandeepSandeepUnnikrishnanVereecken, PhilippePhilippeVereecken2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27031Three-dimensional TiO2 thin-film electrodes deposited on micro-pillars by spatial atomic layer deposition for Li+-ion batteriesMeeting abstract