Houssa, MichelMichelHoussaConard, ThierryThierryConardVan Steenbergen, JanJanVan SteenbergenMavrou, G.G.MavrouPanayiotatos, Y.Y.Panayiotatosdimoulas, A.A.dimoulasMeuris, MarcMarcMeurisCaymax, MattyMattyCaymaxHeyns, MarcMarcHeyns2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10614Characterization of atomic-beam deposited GeO1-xNx/HfO2 stacks on GeMeeting abstract