Sandwich stacks replacing SiO2 in standard bonded Si-on-insulator (SOI) substrates to obtain a high-thermal conductivity HTC-SOI substrate

Van Wichelen, KoenKoenVan WichelenSchaekers, MarcMarcSchaekersDecoutere, StefaanStefaanDecoutereSeacrist, MikeMikeSeacristDrobny, VladimirVladimirDrobnyWise, RickRickWise2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14690Sandwich stacks replacing SiO2 in standard bonded Si-on-insulator (SOI) substrates to obtain a high-thermal conductivity HTC-SOI substrateProceedings paper