A discussion of the practical importance of positron annihilation lifetime spectroscopy percolation threshold in evaluation of porous low-k dielectrics

Mogilnikov, K.P.K.P.MogilnikovBaklanov, MikhaïlMikhaïlBaklanovShamiryan, DenisDenisShamiryanPetkov, M.P.M.P.Petkov2021-10-152021-10-152004-01https://imec-publications.be/handle/20.500.12860/9317A discussion of the practical importance of positron annihilation lifetime spectroscopy percolation threshold in evaluation of porous low-k dielectricsJournal article