Baets, RoelRoelBaetsSelvaraja, ShankarShankarSelvarajaRoelkens, GuntherGuntherRoelkensScheerlinck, StijnStijnScheerlinckDumon, PieterPieterDumonBogaerts, WimWimBogaertsVan Thourhout, DriesDriesVan Thourhout2021-10-172021-10-172008-11https://imec-publications.be/handle/20.500.12860/13329Silicon photonics: from research tot manufacturable productsProceedings paper