Germanium surface passivation and atomic layer deposition of high- k dielectrics - a tutorial review on Ge-based MOS capacitors

Xie, QiQiXieDeng, ShaorenShaorenDengSchaekers, MarcMarcSchaekersLin, DennisDennisLinCaymax, MattyMattyCaymaxDelabie, AnneliesAnneliesDelabieQu, Xin-PingXin-PingQuJiang, Yu-longYu-longJiangDeduytsche, DavyDavyDeduytscheDetavernier, ChristopheChristopheDetavernier2021-10-202021-10-2020120268-1242https://imec-publications.be/handle/20.500.12860/21865Germanium surface passivation and atomic layer deposition of high- k dielectrics - a tutorial review on Ge-based MOS capacitorsJournal article