Van Huylenbroeck, StefaanStefaanVan HuylenbroeckLi, YunlongYunlongLiHeylen, NancyNancyHeylenCroes, KristofKristofCroesBeyer, GeraldGeraldBeyerBeyne, EricEricBeyneBrouri, MohandMohandBrouriGopinath, SanjaySanjayGopinathNalla, PraveenPraveenNallaThorum, MatthewMatthewThorumMeshram, PrashantPrashantMeshramAnjos, Daniela M.Daniela M.AnjosYu, JengyiJengyiYu2021-10-232021-10-232015https://imec-publications.be/handle/20.500.12860/26073Advanced metallization scheme for 3×50μm via middle TSV and beyondProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7159573