Atomic layer deposition of Al2O3 for industrial local Al back-surface field (BSF) solar cells

Rothschild, AudeAudeRothschildVermang, BartBartVermangGoverde, HansHansGoverde2021-10-192021-10-1920111757-1197https://imec-publications.be/handle/20.500.12860/19710Atomic layer deposition of Al2O3 for industrial local Al back-surface field (BSF) solar cellsJournal article