De Wolf, IngridIngridDe WolfCroes, KristofKristofCroesVarela Pedreira, OlallaOlallaVarela PedreiraLabie, RietRietLabieRedolfi, AugustoAugustoRedolfiVan De Peer, MyriamMyriamVan De PeerVanstreels, KrisKrisVanstreelsOkoro, ChukwudiChukwudiOkoroVandevelde, BartBartVandeveldeBeyne, EricEricBeyne2021-10-192021-10-1920110026-2714https://imec-publications.be/handle/20.500.12860/18813Cu pumping in TSVs: Effect of pre-CMP thermal budgetJournal article