Liu, C.S.C.S.LiuChen, H.C.H.C.ChenBao, T.I.T.I.BaoVan Olmen, JanJanVan OlmenCroes, KristofKristofCroesVan Besien, ElsElsVan BesienPantouvaki, MariannaMariannaPantouvakiZhao, ChaoChaoZhaoSleeckx, ErikErikSleeckxBeyer, GeraldGeraldBeyerYu, C.H.C.H.Yu2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14047Self aligned CuGeN process for 32/22nm nodes and beyondProceedings paper