Silicon surface defects: the roles of passivation and surface contamination

Reddy, A. J.A. J.ReddyBurr, T. A.T. A.BurrChan, Julia K.Julia K.ChanNorga, GerdGerdNorgaMichel, J.J.MichelKimerling, L. C.L. C.Kimerling2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2104Silicon surface defects: the roles of passivation and surface contaminationProceedings paper