Vanhellemont, J.J.VanhellemontChen, J.J.ChenLauwaert, J.J.LauwaertVrielinck, H.H.VrielinckXu, W.W.XuYang, D.D.YangRafi, J.M.J.M.RafiOhyama, H.H.OhyamaSimoen, EddyEddySimoen2021-10-192021-10-1920110022-0248https://imec-publications.be/handle/20.500.12860/20035Germanium doping for improved silicon substrates and devicesJournal article