Hermans, JanJanHermansHendrickx, EricEricHendrickxLaidler, DavidDavidLaidlerJehoul, ChristianeChristianeJehoulVan Den Heuvel, DieterDieterVan Den HeuvelGoethals, MiekeMiekeGoethals2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17253Performance of the ASML EUV Alpha demo toolProceedings paper