Ultra-sensitive refractive index gas sensor with functionalized silicon nitride photonic circuits

Antonacci, GiuseppeGiuseppeAntonacciGoyvaerts, JeroenJeroenGoyvaertsZhao, HaolanHaolanZhaoBaumgartner, BettinaBettinaBaumgartnerLendl, BernhardBernhardLendlBaets, RoelRoelBaets2022-01-272021-11-022022-01-2720202378-0967WOS:000562846600001https://imec-publications.be/handle/20.500.12860/38113Ultra-sensitive refractive index gas sensor with functionalized silicon nitride photonic circuitsJournal article10.1063/5.0013577WOS:000562846600001WAVE-GUIDEABSORPTION-SPECTROSCOPYRAMAN-SPECTROSCOPYRESONATORPLATFORM