Struyf, HerbertHerbertStruyfHendrickx, DirkDirkHendrickxVan Olmen, JanJanVan OlmenIacopi, FrancescaFrancescaIacopiRichard, OlivierOlivierRichardTravaly, YoussefYoussefTravalyVan Hove, MarleenMarleenVan HoveBoullart, WernerWernerBoullartVanhaelemeersch, SergeSergeVanhaelemeersch2021-10-162021-10-162005-06https://imec-publications.be/handle/20.500.12860/11289Low-damage damascene patterning of SiOC(H) low-k dielectricsProceedings paper