Patterning challenges for ultimate CMOS and beyond CMOS nano-fabrication

de Marneffe, Jean-FrancoisJean-Francoisde MarneffeAltamirano Sanchez, EfrainEfrainAltamirano SanchezLazzarino, FredericFredericLazzarinoPiumi, DanieleDanielePiumi2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28131Patterning challenges for ultimate CMOS and beyond CMOS nano-fabricationProceedings paperhttp://iplasmanano.org/