Vereecke, GuyGuyVereeckeHolsteyns, FrankFrankHolsteynsArnauts, SophiaSophiaArnautsKenis, KarineKarineKenisLux, MarcelMarcelLuxVos, RitaRitaVosSnow, JimJimSnowMertens, PaulPaulMertens2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9859Evaluation of megasonic cleaning for sub-90-nm technologiesOral presentation