Rouzbahani Bayatani, RozitaRozitaRouzbahani BayataniSankaran, Kamatchi JothiramalingamKamatchi JothiramalingamSankaranPobedinskas, PauliusPauliusPobedinskasHaenen, KenKenHaenen2024-09-232024-04-252024-09-2320242643-6728WOS:001204976100001https://imec-publications.be/handle/20.500.12860/43874Advances in n-Type Chemical Vapor Deposition Diamond Growth: Morphology and Dopant ControlJournal article10.1021/accountsmr.3c00273WOS:001204976100001DOPED DIAMONDMETHANE CONCENTRATIONELECTRONIC-STRUCTUREPHOSPHORUSNITROGENFILMSCENTERSLEVEL